Inventor
Leon Ginzburg
Inventor
Santa Clara, CA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1043%
B08BCleaning in general21%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests14%
C11DDetergent compositions7%
H01LSemiconductor devices7%
Y10TTechnical subjects covered by former us classification7%
PatentTitleYear
8,900,374'Method for substrate cleaning including movement of substrate below substrate cleaning module'20148,757,177'Multi-stage substrate cleaning method and apparatus'20148,739,805'Confinement of foam delivered by a proximity head'20148,584,613'Single substrate processing head for particle removal using low viscosity fluid'20138,317,934'Multi-stage substrate cleaning method and apparatus'20127,849,554'Apparatus and system for cleaning substrate'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2014Patents assigned to LAM RES CORP (6)· patent assignee history
2010–2014Based in Santa Clara, CA, US· patent location history
2012–2014Patents assigned to GINZBURG LEON (5)· patent assignee history
2012–2014Patents assigned to KHOLODENKO ARNOLD (4)· patent assignee history
2012–2014Patents assigned to LIN CHENG-YU SEAN (4)· patent assignee history
2012–2014Patents assigned to KAWAGUCHI MARK (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 6 | 2010–2014 |
| GINZBURG LEONself | 5 | 2012–2014 |
| KHOLODENKO ARNOLD | 4 | 2012–2014 |
| LIN CHENG-YU SEAN | 4 | 2012–2014 |
| KAWAGUCHI MARK | 3 | 2012–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 6 | 2010–2014 |