Inventor
Erik Henricus Egidius Catharina Eummelen
Inventor
Eindhoven, NL
Overview
Patents· 24 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices41%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them7%
H01LSemiconductor devices7%
B01DSeparation3%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
G02BOptical elements, systems or apparatus3%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation3%
B67DDispensing, delivering or transferring liquids, not otherwise provided for2%
G06FElectric digital data processing2%
PatentTitleYear
11,048,178Lithographic apparatus with improved patterning performance202110,969,695Fluid handling structure and lithographic apparatus202110,859,919Fluid handling structure, a lithographic apparatus and a device manufacturing method202010,725,390Inspection substrate and an inspection method202010,649,341Lithographic apparatus202010,551,748Fluid handling structure, a lithographic apparatus and a device manufacturing method202010,534,270Lithography apparatus, a method of manufacturing a device and a control program202010,416,571Fluid handling structure and lithographic apparatus201910,261,422Lithography apparatus and method of manufacturing a device201910,216,100Inspection substrate and an inspection method201910,095,129Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus20189,625,828'Fluid handling structure, lithographic apparatus and device manufacturing method'20179,618,835'Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure'20179,563,132'Fluid handling structure, a lithographic apparatus and a device manufacturing method'20179,465,302'Lithographic apparatus'20169,291,914'Fluid handling structure, a lithographic apparatus and a device manufacturing method'20169,195,147'Lithographic apparatus and device manufacturing method involving a seal between a table and a component'20159,176,393'Lithographic apparatus and a method of operating the apparatus'20159,036,127'Lithographic apparatus'20158,836,912'Fluid handling structure, a lithographic apparatus and a device manufacturing method'20148,599,356'Shutter member, a lithographic apparatus and device manufacturing method'20138,446,561'Lithographic apparatus and a method of measuring flow rate in a two phase flow'20138,416,388'Fluid handling device, an immersion lithographic apparatus and a device manufacturing method'20138,405,817'Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2021Patents assigned to ASML NETHERLANDS BV (24)· patent assignee history
2013–2017Patents assigned to EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA (11)· patent assignee history
2013–2017Patents assigned to BESSEMS DAVID (5)· patent assignee history
2013–2017Patents assigned to RIEPEN MICHEL (4)· patent assignee history
2013–2020Based in Eindhoven, NL· patent location history
2013–2021Based in Veldhoven, NL· patent location history
2014–2017Patents assigned to CORTIE ROGIER HENDRIKUS MAGDALENA (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 24 | 2013–2021 |
| EUMMELEN ERIK HENRICUS EGIDIUS CATHARINAself | 11 | 2013–2017 |
| BESSEMS DAVID | 5 | 2013–2017 |
| RIEPEN MICHEL | 4 | 2013–2017 |
| CORTIE ROGIER HENDRIKUS MAGDALENA | 3 | 2014–2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 18 | 2013–2020 |
| Veldhoven, NL | 6 | 2013–2021 |