Inventor
ELLER Y. JUCO
Inventor
US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
H03HImpedance networks, e.g. resonant circuits28%
H01LSemiconductor devices11%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%
G01RMeasuring electric variables6%
H04BTransmission6%
LOC136%
PatentTitleYear
12,586,757Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system202612,394,601Impedance transformation in radio-frequency-assisted plasma generation202512,136,938Closed-loop multiple-output radio frequency (RF) matching202411,984,298Impedance transformation in radio-frequency-assisted plasma generation202411,594,397Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system202311,557,460Radio frequency (RF) signal source supplying RF plasma generator and remote plasma generator2023D0962881Semiconductor wafer processing apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to LAM RES CORP (7)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 7 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 7 | 2022–2026 |