Inventor
Chi-An Kao
Inventor
Tainan, TW
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G05Bprimary
G05BControl or regulating systems in general27%
Y02PClimate change mitigation technologies in the production or processing of goods27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
G06FElectric digital data processing9%
H01JElectric discharge tubes or discharge lamps9%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h109%
PatentTitleYear
8,983,644'Manufacturing execution system with virtual-metrology capabilities and manufacturing system including the same'20158,688,256'Advanced process control system and method utilizing virtual metrology with reliance index'20148,207,532'Constant and reducible hole bottom CD in variable post-CMP thickness and after-development-inspection CD'20127,829,815'Adjustable electrodes and coils for plasma density distribution control'20107,603,328'Dual-phase virtual metrology method'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2015Patents assigned to UNIV NAT CHENG KUNG (3)· patent assignee history
2009–2015Based in Tainan, TW· patent location history
2010–2012Patents assigned to TAIWAN SEMICONDUCTOR MFG (2)· patent assignee history
2012–2015Patents assigned to KAO CHI-AN (3)· patent assignee history
2012Patents assigned to CHANG YU-PING (1)· patent assignee history
2012Based in Hsinchu, TW· patent location history
2014–2015Patents assigned to CHENG FAN-TIEN (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KAO CHI-ANself | 3 | 2012–2015 |
| UNIV NAT CHENG KUNG | 3 | 2009–2015 |
| CHENG FAN-TIEN | 2 | 2014–2015 |
| TAIWAN SEMICONDUCTOR MFG | 2 | 2010–2012 |
| CHANG YU-PING | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tainan, TW | 4 | 2009–2015 |
| Hsinchu, TW | 1 | 2012 |