Inventor
Albertus Victor Gerardus MANGNUS
Inventor
NL
Overview
Patents· 16 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps42%
G01NInvestigating or analysing materials by determining their chemical or physical properties19%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices13%
G01BMeasuring length, thickness or similar linear dimensions6%
H01LSemiconductor devices6%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h106%
C23CCoating metallic material3%
G06TImage data processing or generation, in general3%
PatentTitleYear
12,562,334Multi-beam charged particle column202612,546,731Inspection tool, inspection tool operating method, and non-transitory computer readable medium202612,422,387Charged particle optical device, objective lens assembly, detector, detector array, and methods202512,394,589Charged particle device, detector, and methods202512,325,911Method and apparatus for forming a patterned layer of material202512,313,980Inspection system, lithographic apparatus, and inspection method202512,230,469Apparatus for and method of local control of a charged particle beam202512,125,671Multi-source charged particle illumination apparatus202411,961,700Systems and methods for image enhancement for a multi-beam charged-particle inspection system202411,942,302Pulsed charged-particle beam system202411,942,303Systems and methods for real time stereo imaging using multiple electron beams202411,881,374Apparatus for and method of controlling an energy spread of a charged-particle beam202411,821,859Charged particle optical device, objective lens assembly, detector, detector array, and methods202311,791,132Aperture array with integrated current measurement202311,442,368Inspection tool, inspection method and computer program product202211,243,179Inspection tool, lithographic apparatus, electron beam source and an inspection method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to ASML NETHERLANDS BV (16)· patent assignee history
2022–2026Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 16 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 16 | 2022–2026 |