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Inventor

Shakar Krishnan

Inventor
Santa Clara, CA, US

Overview

1→
Patents
2007
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Jprimary
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light33%
G01NInvestigating or analysing materials by determining their chemical or physical properties33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
PatentTitleYear
7,277,172'Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals'2007

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2007Patents assigned to KLA TENCOR TECH CORP (1)· patent assignee history
2007Based in Santa Clara, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KLA TENCOR TECH CORP12007
Locations
LocationPatentsSpan
Santa Clara, California, US12007