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Inventor

Yoshikazu Sugiyasu

Inventor
Nirasaki, JP

Overview

1→
Patents
2010
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps100%
PatentTitleYear
7,767,055'Capacitive coupling plasma processing apparatus'2010

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2010Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2010Patents assigned to TOSHIBA KK (1)· patent assignee history
2010Based in Nirasaki, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD12010
TOSHIBA KK12010
Locations
LocationPatentsSpan
Nirasaki, JP12010