LexDanaLexDanabeta
Inventor

BYUNGKWON CHO

Inventor
KR

Overview

1→
Patents
2022
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B08Bprimary
B08BCleaning in general33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
11,527,399Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022Patents assigned to SAMSUNG ELECTRONICS CO LTD (1)· patent assignee history
2022Based in KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SAMSUNG ELECTRONICS CO LTD12022
Locations
LocationPatentsSpan
KR12022