Inventor
Yasuhiro Mizuguchi
Inventor
Toyama, JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
H01LSemiconductor devices31%
C23CCoating metallic material23%
G05BControl or regulating systems in general8%
PatentTitleYear
10,651,068Method of manufacturing semiconductor device by setting process chamber to maintenance enable state202010,290,516Substrate processing apparatus, maintenance method, and maintenance program201910,134,587Method of manufacturing semiconductor device20189,875,920Substrate processing apparatus20189,244,447'Substrate processing apparatus, substrate processing method, non-transitory computer-readable recording medium, and substrate transfer method'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2019Patents assigned to HITACHI INT ELECTRIC INC (4)· patent assignee history
2016–2020Based in Toyama, JP· patent location history
2019Patents assigned to KOKUSAI ELECTRIC CORPOATION (1)· patent assignee history
2020Patents assigned to KOKUSAI ELECTRIC CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI INT ELECTRIC INC | 4 | 2016–2019 |
| KOKUSAI ELECTRIC CORP | 1 | 2020 |
| KOKUSAI ELECTRIC CORPOATION | 1 | 2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Toyama, JP | 5 | 2016–2020 |