Inventor
Yutaka Akaike
Inventor
Yamanashi, JP
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1035%
G01RMeasuring electric variables27%
G03GElectrography8%
B26DCutting4%
B26FPerforating4%
B42CBookbinding4%
B65HHandling thin or filamentary material, e.g. sheets, webs, cables4%
F28DHeat-exchange apparatus, not provided for in another subclass, in which the heat-exchange media do not come into direct contact4%
F28FDetails of heat-exchange and heat-transfer apparatus, of general application4%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices4%
PatentTitleYear
10,307,929Punching apparatus20199,885,747'Substrate inspection apparatus and substrate temperature control method'20188,082,977'Ceramic mounting for wafer apparatus with thermal expansion feature'20117,994,809'Transfer mechanism for target object to be inspected'20117,812,627'Test device'20107,580,109'Substrate supporting unit, and substrate temperature control apparatus and method'20097,525,695'Image reading apparatus'20096,634,245'Drivingly rotatable mechanism of specimen loading table and specimen loading mechanism'20036,317,647'Aligner'20016,307,390'Aligner and method for inspecting semiconductor wafer using shell'20016,262,570'Probe apparatus'20015,912,555'Probe apparatus'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999–2018Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
1999–2018Based in Yamanashi, JP· patent location history
2001–2003Based in Nishiyatsushiro-gun, JP· patent location history
2009Patents assigned to NISCA CORP (1)· patent assignee history
2009–2011Based in Nirasaki, JP· patent location history
2011Patents assigned to AKAIKE YUTAKA (1)· patent assignee history
2011Patents assigned to NAGASAKA MUNETOSHI (1)· patent assignee history
2019Patents assigned to CANON FINETECH NISCA INC (1)· patent assignee history
2019Based in Minamikoma-gun, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 10 | 1999–2018 |
| AKAIKE YUTAKAself | 1 | 2011 |
| CANON FINETECH NISCA INC | 1 | 2019 |
| NAGASAKA MUNETOSHI | 1 | 2011 |
| NISCA CORP | 1 | 2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yamanashi, JP | 5 | 1999–2018 |
| Nirasaki, JP | 4 | 2009–2011 |
| Nishiyatsushiro-gun, JP | 2 | 2001–2003 |
| Minamikoma-gun, JP | 1 | 2019 |