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Inventor

Seiichirou Miyata

Inventor
Yamaguchi, JP

Overview

2→
Patents
1999
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
C23CCoating metallic material20%
H01JElectric discharge tubes or discharge lamps20%
Y10TTechnical subjects covered by former us classification20%
PatentTitleYear
5,981,913'Static electricity chuck and wafer stage'19995,968,273'Wafer stage for manufacturing a semiconductor device'1999

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1999Patents assigned to SONY CORP (2)· patent assignee history
1999Based in Yamaguchi, JP· patent location history
1999Based in Kanagawa, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SONY CORP21999
Locations
LocationPatentsSpan
Yamaguchi, JP11999
Kanagawa, JP11999