Inventor
Alexander Kabansky
Inventor
Santa Clara, CA, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material20%
H01JElectric discharge tubes or discharge lamps20%
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H10NElectric solid-state devices not otherwise provided for16%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
PatentTitleYear
10,825,680Directional deposition on patterned structures202010,515,816Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)201910,186,426Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch)20199,805,941'Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)'20179,576,811'Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2020Patents assigned to LAM RES CORP (5)· patent assignee history
2017–2020Based in Santa Clara, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 5 | 2017–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 5 | 2017–2020 |