Inventor
Kazuichi Hayashi
Inventor
Kofu, JP
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
C23CCoating metallic material12%
B01DSeparation8%
F04BPositive-displacement machines for liquids8%
F04CRotary-piston, or oscillating-piston, positive-displacement machines for liquids8%
F04DNon-positive-displacement pumps8%
F05DIndexing scheme for aspects relating to non-positive-displacement machines or engines, gas-turbines or jet-propulsion plants8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
Y02TClimate change mitigation technologies related to transportation8%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
PatentTitleYear
8,310,054'Semiconductor device manufacturing method and target substrate processing system'20128,038,835'Processing device, electrode, electrode plate, and processing method'20118,003,535'Semiconductor device manufacturing method and target substrate processing system'20116,368,450'Processing apparatus'20026,253,029'Vacuum processing apparatus'20016,156,107'Trap apparatus'20006,149,729'Film forming apparatus and method'20005,942,282'Method for depositing a titanium film'19995,904,757'Trap apparatus'19995,879,139'Vacuum pump with gas heating'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999–2012Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
1999–2002Based in Kofu, JP· patent location history
1999–2001Based in Yamanashi, JP· patent location history
2011–2012Based in Nirasaki, JP· patent location history
2012Patents assigned to HAYASHI KAZUICHI (1)· patent assignee history
2012Patents assigned to MIYOSHI HIDENORI (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 10 | 1999–2012 |
| HAYASHI KAZUICHIself | 1 | 2012 |
| MIYOSHI HIDENORI | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kofu, JP | 5 | 1999–2002 |
| Nirasaki, JP | 3 | 2011–2012 |
| Yamanashi, JP | 2 | 1999–2001 |