Inventor
DAVID C. CONKLIN
Inventor
US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1042%
H01LSemiconductor devices25%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices17%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1017%
PatentTitleYear
12,505,998—202512,381,093Hybrid patterning-bonding semiconductor tool202512,374,562Wafer shape control for W2W bonding202512,204,253In-situ lithography pattern enhancement with localized stress treatment tuning using heat zones202511,994,807In-situ lithography pattern enhancement with localized stress treatment tuning using heat zones2024Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2024–2025Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2024–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 5 | 2024–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 5 | 2024–2025 |