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Inventor

Kouzou Kanagawa

Inventor
Kumamoto, JP

Overview

2→
Patents
2001–2004
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices40%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests20%
PatentTitleYear
6,736,556'Substrate processing apparatus'20046,332,724'Substrate processing apparatus'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001–2004Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2001–2004Based in Kumamoto, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22001–2004
Locations
LocationPatentsSpan
Kumamoto, JP22001–2004