Inventor
CHAN YOUNG HEO
Inventor
KR
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1035%
H01LSemiconductor devices29%
B08BCleaning in general24%
B05CApparatus for applying fluent materials to surfaces, in general6%
C11DDetergent compositions6%
PatentTitleYear
11,890,639Apparatus for treating substrate202411,887,866Supercritical processing apparatus202411,682,577Spin head, apparatus and method for treating a substrate including the spin head202311,621,159Method for treating substrate202311,530,375Substrate cleaning compositions, substrate cleaning method and substrate treating apparatus202211,410,862Apparatus for processing substrate including cooling member closer to central axis than heating member2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2024Patents assigned to SEMES CO LTD (6)· patent assignee history
2022–2024Based in KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SEMES CO LTD | 6 | 2022–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| KR | 6 | 2022–2024 |