Inventor

Seung Hwa Oh

Inventor

Hwaseong-si, KR

Overview

2→

Patents

2016–2017

Patent span

Physics

Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices15%

H01LSemiconductor devices15%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%

G01BMeasuring length, thickness or similar linear dimensions8%

G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light8%

G02BOptical elements, systems or apparatus8%

G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein8%

G06TImage data processing or generation, in general8%

G09GArrangements or circuits for control of indicating devices using static means to present variable information8%

H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%

PatentTitleYear

9,846,359Diffraction-based overlay marks and methods of overlay measurement2017 9,281,250'Method of detecting an asymmetric portion of an overlay mark and method of measuring an overlay including the same'2016

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2016–2017Patents assigned to SAMSUNG ELECTRONICS CO LTD (2)· patent assignee history

2016–2017Based in Hwaseong-si, KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
SAMSUNG ELECTRONICS CO LTD	2	2016–2017

Locations

Location	Patents	Span
Hwaseong-si, KR	2	2016–2017