Inventor
Erik A. Edelberg
Inventor
Castro Valley, CA, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1037%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1019%
H01JElectric discharge tubes or discharge lamps15%
C03CChemical composition of glasses, glazes or vitreous enamels7%
G01NInvestigating or analysing materials by determining their chemical or physical properties7%
Y10TTechnical subjects covered by former us classification7%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices4%
H01LSemiconductor devices4%
PatentTitleYear
8,906,194'Ultra-high aspect ratio dielectric etch'20148,741,165'Reducing twisting in ultra-high aspect ratio dielectric etch'20148,475,673'Method and apparatus for high aspect ratio dielectric etch'20138,425,682'High strip rate downstream chamber'20138,298,336'High strip rate downstream chamber'20127,977,390'Method for plasma etching performance enhancement'20117,682,986'Ultra-high aspect ratio dielectric etch'20107,547,636'Pulsed ultra-high aspect ratio dielectric etch'20097,542,134'System, method and apparatus for in-situ substrate inspection'20097,397,555'System, method and apparatus for in-situ substrate inspection'20087,204,934'Method for planarization etch with in-situ monitoring by interferometry prior to recess etch'20077,083,903'Methods of etching photoresist on substrates'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2014Patents assigned to LAM RES CORP (11)· patent assignee history
2006–2013Based in Castro Valley, CA, US· patent location history
2007Based in San Francisco, CA, US· patent location history
2012–2014Patents assigned to EDELBERG ERIK A (4)· patent assignee history
2012Patents assigned to CHEBI ROBERT P (1)· patent assignee history
2012Patents assigned to COOPERBERG DAVID J (1)· patent assignee history
2013–2014Based in San Ramon, CA, US· patent location history
2014Patents assigned to CHI KYEONG-KOO (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 11 | 2006–2014 |
| EDELBERG ERIK Aself | 4 | 2012–2014 |
| CHEBI ROBERT P | 1 | 2012 |
| CHI KYEONG-KOO | 1 | 2014 |
| COOPERBERG DAVID J | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Castro Valley, California, US | 8 | 2006–2013 |
| San Ramon, California, US | 3 | 2013–2014 |
| San Francisco, California, US | 1 | 2007 |