Inventor
Matthew R. VanHanehem
Inventor
Bear, DE, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C09Gprimary
C09GPolishing compositions24%
C09KMaterials for miscellaneous applications, not provided for elsewhere24%
B24BMachines, devices, or processes for grinding or polishing18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
B24DTools for grinding, buffing or sharpening6%
C01BNon-metallic elements6%
H01LSemiconductor devices6%
PatentTitleYear
10,954,411Chemical mechanical polishing composition and method of polishing silicon nitride over silicon dioxide and simultaneously inhibiting damage to silicon dioxide20217,300,480'High-rate barrier polishing composition'20077,056,829'Polishing composition for semiconductor wafers'20066,916,742'Modular barrier removal polishing slurry'20056,843,708'Method of reducing defectivity during chemical mechanical planarization'20056,419,553'Methods for break-in and conditioning a fixed abrasive polishing pad'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002Patents assigned to RODEL INC (1)· patent assignee history
2002–2007Based in Bear, DE, US· patent location history
2005–2007Patents assigned to ROHM & HAAS ELECT MAT (4)· patent assignee history
2021Patents assigned to ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC (1)· patent assignee history
2021Patents assigned to ROHM AND HAAS ELECTRONIC MAT CMP HOLDINGS (1)· patent assignee history
2021Based in Middletown, DE, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ROHM & HAAS ELECT MAT | 4 | 2005–2007 |
| RODEL INC | 1 | 2002 |
| ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC | 1 | 2021 |
| ROHM AND HAAS ELECTRONIC MAT CMP HOLDINGS | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Bear, Delaware, US | 5 | 2002–2007 |
| Middletown, Delaware, US | 1 | 2021 |