Inventor
VINCENT BURKHART
Inventor
US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps20%
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling13%
H02NElectric machines not otherwise provided for13%
C23CCoating metallic material7%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices7%
PatentTitleYear
12,243,725High temperature RF connection with integral thermal choke202511,990,360Electrostatic chuck (ESC) pedestal voltage isolation202411,835,868Protective coating for electrostatic chucks202311,232,966Electrostatic chucking pedestal with substrate backside purging and thermal sinking2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to LAM RES CORP (4)· patent assignee history
2022–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 4 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 4 | 2022–2025 |