Inventor
Tzu-Chin Chuang
Inventor
Cupertino, CA, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps31%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1013%
C23FNon-mechanical removal of metallic material from surface6%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
G09GArrangements or circuits for control of indicating devices using static means to present variable information6%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests6%
Y10TTechnical subjects covered by former us classification6%
PatentTitleYear
8,890,066'Sharp scattering angle trap for electron beam apparatus'20148,765,496'Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis'20147,879,730'Etch selectivity enhancement in electron beam activated chemical etch'20117,709,792'Three-dimensional imaging using electron beam activated chemical etch'20107,304,302'Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis'20075,693,983'Thin-film structure with conductive molybdenum-chromium line'19975,528,082'Thin-film structure with tapered feature'19965,518,805'Hillock-free multilayer metal lines for high performance thin film structures'19965,491,347'Thin-film structure with dense array of binary control units for presenting images'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996–1997Patents assigned to XEROX CORP (4)· patent assignee history
1996–1997Based in Saratoga, CA, US· patent location history
2007–2014Patents assigned to KLA TENCOR TECH CORP (4)· patent assignee history
2007–2014Based in Cupertino, CA, US· patent location history
2014Patents assigned to NASSER-GHODSI MEHRAN (2)· patent assignee history
2014Patents assigned to AJI PRASHANT (1)· patent assignee history
2014Patents assigned to BAKKER DAVE (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR TECH CORP | 4 | 2007–2014 |
| XEROX CORP | 4 | 1996–1997 |
| NASSER-GHODSI MEHRAN | 2 | 2014 |
| AJI PRASHANT | 1 | 2014 |
| BAKKER DAVE | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Cupertino, California, US | 5 | 2007–2014 |
| Saratoga, California, US | 4 | 1996–1997 |