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Inventor

Koji Ohsawa

Inventor
Tsukuba, JP

Overview

1→
Patents
2001
Patent span
Performing operations
Primary field (CPC B)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B08Bprimary
B08BCleaning in general33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests33%
PatentTitleYear
6,248,180'Method for removing particles from a semiconductor wafer'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001Patents assigned to LSI LOGIC CORP (1)· patent assignee history
2001Based in Tsukuba, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LSI LOGIC CORP12001
Locations
LocationPatentsSpan
Tsukuba, JP12001