Inventor

Steven J. Haney

Inventor

Tracy, CA, US

Overview

12→

Patents

1985–2007

Patent span

Physics

Primary field (CPC G)

Patents· 12 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%

B66FHoisting, lifting, hauling or pushing, not otherwise provided for, e.g. devices which apply a lifting or pushing force directly to the surface of a load12%

G02BOptical elements, systems or apparatus12%

A61BDiagnosis6%

B08BCleaning in general6%

B82YSpecific uses or applications of nanostructures6%

F17CVessels for containing or storing compressed, liquefied or solidified gases6%

G01NInvestigating or analysing materials by determining their chemical or physical properties6%

G21KHandling of particles or ionising radiation not otherwise provided for6%

H01JElectric discharge tubes or discharge lamps6%

PatentTitleYear

7,195,354'Adaptive ophthalmologic system'2007 6,900,952'System and method for reproducibly mounting an optical element'2005 6,734,422'Portable outgas detection apparatus'2004 6,642,995'Mask-to-wafer alignment system'2003 6,561,486'Motorized support jack'2003 6,549,264'Extreme-UV lithography vacuum chamber zone seal'2003 6,545,745'Extreme-UV lithography vacuum chamber zone seal'2003 6,333,775'Extreme-UV lithography vacuum chamber zone seal'2001 6,328,282'Motorized support jack'2001 6,192,897'Apparatus and method for in-situ cleaning of resist outgassing windows'2001 6,031,598'Extreme ultraviolet lithography machine'2000 4,538,068'Manipulator having thermally conductive rotary joint for transferring heat from a test specimen'1985

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1985Patents assigned to US ENERGY (1)· patent assignee history

1985–2007Based in Tracy, CA, US· patent location history

2000–2004Patents assigned to EUV LLC (9)· patent assignee history

2001–2003Based in Tracey, CA, US· patent location history

2005Patents assigned to SANDIA NAT LAB (1)· patent assignee history

2007Patents assigned to UNIV CALIFORNIA (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
EUV LLC	9	2000–2004
SANDIA NAT LAB	1	2005
UNIV CALIFORNIA	1	2007
US ENERGY	1	1985

Locations

Location	Patents	Span
Tracy, California, US	10	1985–2007
Tracey, California, US	2	2001–2003