Inventor
Ta-Cheng Lien
Inventor
Hsinchu County, TW
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices56%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H01LSemiconductor devices15%
H01JElectric discharge tubes or discharge lamps4%
PatentTitleYear
11,119,398EUV photo masks202111,106,126Method of manufacturing EUV photo masks202111,048,158Method for extreme ultraviolet lithography mask treatment202110,534,256Pellicle assembly and method for advanced lithography202010,274,819EUV pellicle fabrication methods and structures thereof201910,036,951Pellicle assembly and fabrication methods thereof20189,897,910'Treating a capping layer of a mask'20189,857,679'Lithography mask and fabricating the same'20189,759,997'Pellicle assembly and method for advanced lithography'20179,651,857'Mask and method for forming the same'20179,535,317'Treating a capping layer of a mask'20179,341,940'Reticle and method of fabricating the same'20168,974,988'Mask and method for forming the same'20158,916,482'Method of making a lithography mask'20148,679,707'Method of fabricating a lithography mask'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2015Patents assigned to CHEN CHIA-JEN (3)· patent assignee history
2014–2015Patents assigned to LEE HSIN-CHANG (3)· patent assignee history
2014–2015Patents assigned to LIEN TA-CHENG (3)· patent assignee history
2014–2015Patents assigned to LIN YUN-YUE (3)· patent assignee history
2014–2021Based in Hsinchu County, TW· patent location history
2016–2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (12)· patent assignee history
2016Based in Jhudong Township, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 12 | 2016–2021 |
| CHEN CHIA-JEN | 3 | 2014–2015 |
| LEE HSIN-CHANG | 3 | 2014–2015 |
| LIEN TA-CHENGself | 3 | 2014–2015 |
| LIN YUN-YUE | 3 | 2014–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu County, TW | 12 | 2014–2021 |
| Jhudong Township, TW | 1 | 2016 |