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Inventor

Cayetano Sanchez-Fabres Cobaleda

Inventor
Eindhoven, NL

Overview

3→
Patents
2019–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices43%
H01LSemiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1014%
PatentTitleYear
10,607,873Substrate edge detection202010,527,957Method and apparatus for processing a substrate in a lithographic apparatus202010,429,750Alignment mark recovery method and lithographic apparatus2019

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2019–2020Patents assigned to ASML NETHERLANDS BV (3)· patent assignee history
2019–2020Based in Eindhoven, NL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV32019–2020
Locations
LocationPatentsSpan
Eindhoven, NL32019–2020