Inventor
Young-bum Koh
Inventor
Seoul, KR
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices24%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests24%
C08FMacromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
B08BCleaning in general7%
C11DDetergent compositions7%
B24BMachines, devices, or processes for grinding or polishing3%
C07CAcyclic or carbocyclic compounds3%
PatentTitleYear
6,713,229'Terpolymer for amplified resist'20046,416,927'Chemically amplified resist compositions'20026,280,903'Chemically amplified resist composition'20016,277,204'Methods for cleaning wafers used in integrated circuit devices'20016,171,754'Chemically amplified resist compositions'20016,114,084'Chemically amplified resist composition'20006,103,845'Chemically amplified resist polymers'20006,092,539'In-situ cleaning apparatuses for wafers used in integrated circuit devices and methods of cleaning using the same'20006,043,206'Solutions for cleaning integrated circuit substrates'20005,851,727'Photosensitive polymers and photoresist compositions containing the same'19985,789,360'Cleaning solution for use on a semiconductor wafer following chemical-mechanical polishing of the wafer and method for using same'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2004Patents assigned to SAMSUNG ELECTRONICS CO LTD (11)· patent assignee history
1998–2004Based in Seoul, KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 11 | 1998–2004 |
Locations
| Location | Patents | Span |
|---|---|---|
| Seoul, KR | 11 | 1998–2004 |