Inventor
Heiko Stahl
Inventor
Reutlingen, DE
Overview
Patents· 17 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B81Bprimary
B81BMicrostructural devices or systems, e.g. micromechanical devices28%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems25%
H01LSemiconductor devices10%
G01PMeasuring linear or angular speed, acceleration, deceleration, or shock5%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h105%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%
C01BNon-metallic elements3%
C01PIndexing scheme relating to structural and physical aspects of solid inorganic compounds3%
C23CCoating metallic material3%
F04BPositive-displacement machines for liquids3%
PatentTitleYear
10,775,253Method for producing a micromechanical component with an exposed pressure sensor device and micromechanical component202010,766,778Polycrystalline material having low mechanical strain; method for producing a polycrystalline material202010,643,896Method for producing at least one via in a wafer202010,336,610Method for producing a micromechanical component20199,725,300'Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes'20179,667,419'System and method for cryptographic key identification'20179,650,240'Component including two semiconductor elements, which are bonded to one another via a structured bonding layer, and method for manufacturing a component of this type'20179,428,378'Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component'20169,206,034'Micromechanical component having a bond joint'20158,563,344'Method for producing MEMS structures, and MEMS structure'20138,492,188'Method for producing a micromechanical component'20138,402,827'Sensor element and method for operating a sensor element'20138,393,215'Micromechanical acceleration sensor having an open seismic mass'20138,174,082'Micromechanical component having multiple caverns, and manufacturing method'20127,863,072'Micromechanical diaphragm sensor having a double diaphragm'20117,740,459'Micropump having a pump diaphragm and a polysilicon layer'20107,436,076'Micromechanical component having an anodically bonded cap and a manufacturing method'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2020Patents assigned to BOSCH GMBH ROBERT (17)· patent assignee history
2008–2020Based in Reutlingen, DE· patent location history
2012–2015Patents assigned to STAHL HEIKO (6)· patent assignee history
2013Patents assigned to REINMUTH JOCHEN (2)· patent assignee history
2015Patents assigned to BAER HANS-PETER (1)· patent assignee history
2015Patents assigned to DUENN CHRISTOPH (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| BOSCH GMBH ROBERT | 17 | 2008–2020 |
| STAHL HEIKOself | 6 | 2012–2015 |
| REINMUTH JOCHEN | 2 | 2013 |
| BAER HANS-PETER | 1 | 2015 |
| DUENN CHRISTOPH | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Reutlingen, DE | 17 | 2008–2020 |