Inventor
Yihong Chen
Inventor
San Jose, CA, US
Overview
Patents· 32 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1021%
C23CCoating metallic material9%
H10DInorganic electric semiconductor devices7%
H01JElectric discharge tubes or discharge lamps3%
H04JMultiplex communication3%
H10BElectronic memory devices3%
C09DCoating compositions, e.g. paints, varnishes or lacquers1%
C23FNon-mechanical removal of metallic material from surface1%
PatentTitleYear
10,854,511Methods of lowering wordline resistance202010,854,461Tungsten deposition without barrier layer202010,790,141Surface-selective atomic layer deposition using hydrosilylation passivation202010,784,107Methods of forming tungsten pillars202010,741,435Oxidative volumetric expansion of metals and metal containing compounds202010,636,659Selective deposition for simplified process flow of pillar formation202010,636,669Seam healing using high pressure anneal202010,622,251Methods for wordline separation in 3D-NAND devices202010,615,050Methods for gapfill in high aspect ratio structures202010,600,684Ultra-thin diffusion barriers202010,559,465Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxide202010,559,497Seamless tungsten fill by tungsten oxidation-reduction202010,480,074Apparatus for radical-based deposition of dielectric films201910,468,263Tungsten deposition without barrier layer201910,410,865Methods of forming self-aligned vias201910,354,916Methods for wordline separation in 3D-NAND devices201910,319,624Oxidative volumetric expansion of metals and metal containing compounds201910,319,604Methods for self-aligned patterning201910,276,379Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide201910,002,757Selectively lateral growth of silicon oxide thin film20189,978,685Conformal amorphous silicon as nucleation layer for W ALD process20189,840,777'Apparatus for radical-based deposition of dielectric films'20179,741,558'Selectively lateral growth of silicon oxide thin film'20179,613,908'Ultra-thin dielectric diffusion barrier and etch stop layer for advanced interconnect applications'20179,548,543'Method for fabricating and packaging an M×N phased-array antenna'20179,508,545'Selectively lateral growth of silicon oxide thin film'20169,384,950'Chamber coatings'20169,368,448'Metal-containing films as dielectric capping barrier for advanced interconnects'20169,255,335'Catalysts for low temperature electrolytic CO2 reduction'20168,265,490'Transamplifier, system and method for amplification of optical signals at plural wavelengths'20128,111,992'Amplified wavelength broadband video distribution architectures'20127,903,980'Amplified wavelength broadband video distribution architectures using a phase modulating waveguide'2011Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2011–2017Patents assigned to CHEN YIHONG (5)· patent assignee history
2011–2012Patents assigned to CONDRA STEVEN C (3)· patent assignee history
2011–2012Patents assigned to SULHOFF JAMES W (3)· patent assignee history
2011–2012Patents assigned to SWEENEY KEVIN L (3)· patent assignee history
2011–2012Based in Naperville, IL, US· patent location history
2016–2020Patents assigned to APPLIED MATERIALS INC (27)· patent assignee history
2016–2020Based in San Jose, CA, US· patent location history
2016Based in Stanford, CA, US· patent location history
2017Based in Austin, TX, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 27 | 2016–2020 |
| CHEN YIHONGself | 5 | 2011–2017 |
| CONDRA STEVEN C | 3 | 2011–2012 |
| SULHOFF JAMES W | 3 | 2011–2012 |
| SWEENEY KEVIN L | 3 | 2011–2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 27 | 2016–2020 |
| Naperville, Illinois, US | 3 | 2011–2012 |
| Austin, Texas, US | 1 | 2017 |
| Stanford, California, US | 1 | 2016 |