Inventor

Yu-Ku Lin

Inventor

Hsinchu, TW

Overview

32→

Patents

2000–2020

Patent span

Electricity

Primary field (CPC H)

Patents· 32 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Wprimary

H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1026%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%

H01LSemiconductor devices14%

H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation11%

B24BMachines, devices, or processes for grinding or polishing9%

C25DProcesses for the electrolytic or electrophoretic production of coatings6%

H10DInorganic electric semiconductor devices5%

Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests3%

B08BCleaning in general2%

C25FProcesses for the electrolytic removal of materials from objects2%

PatentTitleYear

10,867,889Method of manufacturing semiconductor structure2020 10,818,716Image sensor device and fabricating method thereof2020 10,367,021Image sensor device and fabricating method thereof2019 10,074,594Semiconductor structure and manufacturing method thereof2018 9,991,204Through via structure for step coverage improvement2018 9,859,124'Method of manufacturing semiconductor device with recess'2018 9,711,454'Through via structure for step coverage improvement'2017 9,601,535'Semiconducator image sensor having color filters formed over a high-K dielectric grid'2017 9,419,155'Sensing product and method of making'2016 8,815,630'Back side illumination (BSI) sensors, manufacturing methods thereof, and semiconductor device manufacturing methods'2014 8,642,439'Semiconductor device and method of formation'2014 8,435,893'Semiconductor device and method of formation'2013 7,955,993'Oxygen plasma reduction to eliminate precursor overflow in BPTEOS film deposition'2011 7,417,321'Via structure and process for forming the same'2008 7,368,379'Multi-layer interconnect structure for semiconductor devices'2008 7,312,149'Copper plating of semiconductor devices using single intermediate low power immersion step'2007 7,304,728'Test device and method for laser alignment calibration'2007 7,128,821'Electropolishing method for removing particles from wafer surface'2006 7,071,100'Method of forming barrier layer with reduced resistivity and improved reliability in copper damascene process'2006 6,863,491'Catch-pin water support for process chamber'2005 6,769,959'Method and system for slurry usage reduction in chemical mechanical polishing'2004 6,695,921'Hoop support for semiconductor wafer'2004 6,682,605'Apparatus and method for removing coating layers from alignment marks'2004 6,626,741'Method for improving thickness uniformity on a semiconductor wafer during chemical mechanical polishing'2003 6,551,927'CoSix process to improve junction leakage'2003 6,531,382'Use of a capping layer to reduce particle evolution during sputter pre-clean procedures'2003 6,514,673'Rule to determine CMP polish time'2003 6,372,645'Methods to reduce metal bridges and line shorts in integrated circuits'2002 6,352,924'Rework method for wafers that trigger WCVD backside alarm'2002 6,248,002'Obtaining the better defect performance of the fuse CMP process by adding slurry polish on more soft pad after slurry polish'2001 6,232,043'Rule to determine CMP polish time'2001 6,099,662'Process for cleaning a semiconductor substrate after chemical-mechanical polishing'2000

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2000–2014Patents assigned to TAIWAN SEMICONDUCTOR MFG (22)· patent assignee history

2000–2008Based in Hsinchu, TW· patent location history

2006–2016Patents assigned to LIN YU-KU (3)· patent assignee history

2006–2016Patents assigned to WANG YING-LANG (3)· patent assignee history

2008Based in Hsin Chu, TW· patent location history

2011–2020Based in Tainan, TW· patent location history

2013–2016Patents assigned to CHANG SHIH-CHIEH (2)· patent assignee history

2016–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (9)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
TAIWAN SEMICONDUCTOR MFG	22	2000–2014
TAIWAN SEMICONDUCTOR MFG CO LTD	9	2016–2020
LIN YU-KUself	3	2006–2016
WANG YING-LANG	3	2006–2016
CHANG SHIH-CHIEH	2	2013–2016

Locations

Location	Patents	Span
Hsinchu, TW	18	2000–2008
Tainan, TW	13	2011–2020
Hsin Chu, TW	1	2008