Inventor
Mark Winkler
Inventor
Ridgefield, CT, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G05Bprimary
G05BControl or regulating systems in general40%
Y02PClimate change mitigation technologies in the production or processing of goods25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices10%
F27BFurnaces, kilns, ovens or retorts in general5%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
PatentTitleYear
7,935,545'Method and apparatus for performing a site-dependent dual patterning procedure'20117,842,519'In-line lithography and etch system'20107,783,374'Method and apparatus for performing a site-dependent dual damascene procedure'20107,741,583'Bake plate lid cleaner and cleaning method'20107,729,795'Method and apparatus for verifying a site-dependent wafer'20107,650,200'Method and apparatus for creating a site-dependent evaluation library'20107,596,423'Method and apparatus for verifying a site-dependent procedure'20097,531,368'In-line lithography and etch system'20097,373,216'Method and apparatus for verifying a site-dependent wafer'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2011Patents assigned to TOKYO ELECTRON LTD (9)· patent assignee history
2008–2011Based in Ridgefield, CT, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 9 | 2008–2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| Ridgefield, CT, US | 9 | 2008–2011 |