Inventor
RYUICHI ASAKO
Inventor
JP
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01LSemiconductor devices21%
H01JElectric discharge tubes or discharge lamps12%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1012%
B05DProcesses for applying fluent materials to surfaces, in general7%
C23CCoating metallic material7%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices7%
C09KMaterials for miscellaneous applications, not provided for elsewhere5%
C11DDetergent compositions2%
H10NElectric solid-state devices not otherwise provided for2%
PatentTitleYear
12,532,683Apparatus for substrate processing202612,444,606Methods for forming vertically layered ionic liquid crystal (ILC) structures on a semiconductor substrate202512,417,928Substrate processing method and substrate processing system202512,406,862Vacuum processing apparatus and oxidizing gas removal method202512,379,653Pattern formation method and photosensitive hard mask202512,011,738Substrate processing method and ionic liquid202411,842,900Etching method and plasma processing apparatus202311,538,693Substrate processing method and substrate processing system202211,488,836Apparatus for substrate processing202211,456,184Substrate processing method and substrate processing system2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
2022–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 10 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 10 | 2022–2026 |