Inventor
Chung-Ho Huang
Inventor
San Jose, CA, US
Overview
Patents· 28 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
G05BControl or regulating systems in general23%
Y02PClimate change mitigation technologies in the production or processing of goods16%
H01JElectric discharge tubes or discharge lamps10%
G06FElectric digital data processing6%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
H04LTransmission of digital information, e.g. telegraphic communication4%
G06QInformation and communication technology [ict] specially adapted for administrative, commercial, financial, managerial or supervisory purposes3%
B08BCleaning in general1%
G01MTesting static or dynamic balance of machines or structures1%
PatentTitleYear
10,747,210System and method for automating user interaction for semiconductor manufacturing equipment20209,927,798'Mobile connectivity and control of semiconductor manufacturing equipment'20189,871,759'Social network service for semiconductor manufacturing equipment and users'20189,736,135'Method, apparatus, and system for establishing a virtual tether between a mobile device and a semiconductor processing tool'20178,983,631'Arrangement for identifying uncontrolled events at the process module level and methods thereof'20158,906,163'Methods and apparatus for integrating and controlling a plasma processing system'20148,480,913'Plasma processing method and apparatus with control of plasma excitation power'20138,295,963'Methods for performing data management for a recipe-and-component control module'20128,185,242'Dynamic alignment of wafers using compensation values obtained through a series of wafer movements'20128,010,483'Component-tracking system and methods therefor'20118,000,827'Processing information management system in a plasma processing tool'20117,899,627'Automatic dynamic baseline creation and adjustment'20117,882,076'Primary server architectural networking arrangement and methods therefor'20117,814,046'Dynamic component-tracking system and methods therefor'20107,672,747'Recipe-and-component control module and methods thereof'20107,565,220'Targeted data collection architecture'20097,558,641'Recipe report card framework and methods thereof'20097,542,820'Methods and arrangement for creating recipes using best-known methods'20097,536,538'Cluster tools for processing substrates using at least a key file'20097,469,195'Integrated stepwise statistical process control in a plasma processing system'20087,356,580'Plug and play sensor integration for a process module'20087,353,379'Methods for configuring a plasma cluster tool'20087,228,257'Architecture for general purpose programmable semiconductor processing system and methods therefor'20077,162,317'Methods and apparatus for configuring plasma cluster tools'20076,855,567'Etch endpoint detection'20056,825,050'Integrated stepwise statistical process control in a plasma processing system'20046,622,286'Integrated electronic hardware for wafer processing control and diagnostic'20036,526,355'Integrated full wavelength spectrometer for wafer processing'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2020Patents assigned to LAM RES CORP (28)· patent assignee history
2003–2018Based in Fremont, CA, US· patent location history
2007–2020Based in San Jose, CA, US· patent location history
2012–2014Patents assigned to HUANG CHUNG-HO (3)· patent assignee history
2012–2015Patents assigned to HUANG CHUNG HO (2)· patent assignee history
2012Patents assigned to BAILEY III ANDREW D (1)· patent assignee history
2012Patents assigned to CHEN JACK (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 28 | 2003–2020 |
| HUANG CHUNG-HOself | 3 | 2012–2014 |
| HUANG CHUNG HOself | 2 | 2012–2015 |
| BAILEY III ANDREW D | 1 | 2012 |
| CHEN JACK | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 20 | 2007–2020 |
| Fremont, California, US | 8 | 2003–2018 |