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Inventor

Yuichi Mikata

Inventor
Yokohama, JP

Overview

8→
Patents
1993–2008
Patent span
Chemistry
Primary field (CPC C)

Patents· 8 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1037%
C23CCoating metallic material26%
C30BSingle-crystal growth16%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests11%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices5%
H01JElectric discharge tubes or discharge lamps5%
PatentTitleYear
7,344,805'Mask and method for producing thereof and a semiconductor device using the same'20086,383,897'Apparatus for manufacturing a semiconductor device in a CVD reactive chamber'20026,211,081'Method of manufacturing a semiconductor device in a CVD reactive chamber'20016,188,838'Apparatus for heat treating a semiconductor wafer to reduce stress'20015,893,760'Method of heat treating a semiconductor wafer to reduce stress'19995,750,436'Thermal processing method and apparatus therefor'19985,484,484'Thermal processing method and apparatus therefor'19965,252,133'Vertically oriented CVD apparatus including gas inlet tube having gas injection holes'1993

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1993–2002Patents assigned to TOSHIBA KK (7)· patent assignee history
1993–1998Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
1993–1998Based in Kawasaki, JP· patent location history
1996Patents assigned to TOKYO ELEKTRON TOHOKU KK (1)· patent assignee history
1998Patents assigned to TOKYO ELECTRON TOHOKU KABUSHIK (1)· patent assignee history
1999–2002Based in Yokohama, JP· patent location history
2008Patents assigned to ROHM CO LTD (1)· patent assignee history
2008Based in Ibaraki, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOSHIBA KK71993–2002
TOKYO ELECTRON LTD31993–1998
ROHM CO LTD12008
TOKYO ELECTRON TOHOKU KABUSHIK11998
TOKYO ELEKTRON TOHOKU KK11996
Locations
LocationPatentsSpan
Yokohama, JP41999–2002
Kawasaki, JP31993–1998
Ibaraki, JP12008