Inventor
Paul B. Reuter
Inventor
Austin, TX, US
Overview
Patents· 24 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
Y10TTechnical subjects covered by former us classification8%
C23CCoating metallic material7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
A47BTables3%
F16KValves3%
G01FMeasuring volume, volume flow, mass flow or liquid level3%
H01JElectric discharge tubes or discharge lamps3%
B05BSpraying apparatus1%
PatentTitleYear
11,081,379Load port operation in electronic device manufacturing apparatus, systems, and methods202111,061,417Selectable-rate bottom purge apparatus and methods202110,946,406Metering apparatus202110,943,788Abatement and strip process chamber in a load lock configuration202110,832,928Systems, apparatus, and methods for an improved load port202010,758,045Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods202010,566,205Abatement and strip process chamber in a load lock configuration202010,541,165Systems, apparatus, and methods for an improved load port backplane202010,468,282Method and apparatus for substrate transfer and radical confinement201910,453,694Abatement and strip process chamber in a dual loadlock configuration201910,453,726Electronic device manufacturing load port apparatus, systems, and methods201910,446,428Load port operation in electronic device manufacturing apparatus, systems, and methods201910,381,247Gas systems and methods for chamber ports201910,278,501Load lock door assembly, load lock apparatus, electronic device processing systems, and methods201910,276,354Segmented focus ring assembly201910,262,884Systems, apparatus, and methods for an improved load port201910,204,805Thin heated substrate support201910,090,181Method and apparatus for substrate transfer and radical confinement201810,056,274System and method for forming a sealed chamber20189,587,749'Slit valve with a pressurized gas bearing'20179,524,889'Processing systems and apparatus adapted to process substrates in electronic device manufacturing'20169,464,732'Apparatus for uniform pumping within a substrate process chamber'20169,435,025'Gas apparatus, systems, and methods for chamber ports'20169,355,876'Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2021Patents assigned to APPLIED MATERIALS INC (21)· patent assignee history
2016–2021Based in Austin, TX, US· patent location history
2017–2018Patents assigned to APPLIED MATERIALS ISRAEL LTD (2)· patent assignee history
2018–2019Patents assigned to LEE JARED AHMAD (2)· patent assignee history
2018–2019Patents assigned to PAL ANIRUDDHA (2)· patent assignee history
2018–2019Patents assigned to REUTER PAUL B (2)· patent assignee history
2021Based in Dachau, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 21 | 2016–2021 |
| APPLIED MATERIALS ISRAEL LTD | 2 | 2017–2018 |
| LEE JARED AHMAD | 2 | 2018–2019 |
| PAL ANIRUDDHA | 2 | 2018–2019 |
| REUTER PAUL Bself | 2 | 2018–2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Austin, Texas, US | 23 | 2016–2021 |
| Dachau, DE | 1 | 2021 |