Inventor
Toyohisa Tsuruda
Inventor
Koshi, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices24%
H01LSemiconductor devices19%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form5%
C02FTreatment of water, waste water, sewage, or sludge5%
G06FElectric digital data processing5%
H05BElectric heating5%
Y02BClimate change mitigation technologies related to buildings, e.g. housing, house appliances or related end-user applications5%
Y10TTechnical subjects covered by former us classification5%
PatentTitleYear
10,937,673Substrate processing apparatus, substrate processing method and recording medium202110,248,030Process recipe evaluation method, storage medium, assisting device for process recipe evaluation, and liquid processing apparatus201910,211,050Method for photo-lithographic processing in semiconductor device manufacturing201910,023,477Treatment solution supply method, treatment solution supply apparatus, and non-transitory computer-readable recording medium20188,992,687'Substrate processing apparatus, method for processing substrate, and storage medium'20158,801,891'Substrate warpage removal apparatus and substrate processing apparatus'20148,455,183'Resist pattern slimming treatment method'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2021Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2013–2015Patents assigned to TSURUDA TOYOHISA (3)· patent assignee history
2013Patents assigned to KONDO YOSHIHIRO (1)· patent assignee history
2013–2021Based in Koshi, JP· patent location history
2015Patents assigned to KUDOH HIROYUKI (1)· patent assignee history
2015Patents assigned to MORI HIDETO (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 2013–2021 |
| TSURUDA TOYOHISAself | 3 | 2013–2015 |
| KONDO YOSHIHIRO | 1 | 2013 |
| KUDOH HIROYUKI | 1 | 2015 |
| MORI HIDETO | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Koshi, JP | 7 | 2013–2021 |