Inventor
ANAND CHANDRASHEKAR
Inventor
US
Overview
Patents· 16 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1020%
C23CCoating metallic material19%
H01LSemiconductor devices16%
H10BElectronic memory devices10%
H01JElectric discharge tubes or discharge lamps9%
H05HPlasma technique1%
H10DInorganic electric semiconductor devices1%
PatentTitleYear
12,531,210Edge exclusion control202612,476,143Backside reactive inhibition gas202512,448,686Reducing line bending during metal fill process202512,444,651Tungsten feature fill with nucleation inhibition202512,394,608Cleaning system for removing deposits from pump in an exhaust of a substrate processing system202512,387,979Tungsten feature fill with nucleation inhibition202512,261,081Tungsten feature fill with inhibition control202512,227,837Ex situ coating of chamber components for semiconductor processing202512,173,399Reducing line bending during metal fill process202412,163,219Ex situ coating of chamber components for semiconductor processing202412,002,679High step coverage tungsten deposition202411,978,666Void free low stress fill202411,901,227Feature fill with nucleation inhibition202411,437,269Tungsten feature fill with nucleation inhibition202211,410,883Tungsten feature fill with nucleation inhibition202211,365,479Ex situ coating of chamber components for semiconductor processing2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to LAM RES CORP (12)· patent assignee history
2022–2025Patents assigned to NOVELLUS SYSTEMS INC (4)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 12 | 2022–2026 |
| NOVELLUS SYSTEMS INC | 4 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 16 | 2022–2026 |