LexDanaLexDanabeta
Inventor

Tomofumi Nishikawara

Inventor
Utsunomiya, JP

Overview

4→
Patents
2008–2017
Patent span
Physics
Primary field (CPC G)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
B29CShaping or joining of plastics10%
B82YSpecific uses or applications of nanostructures10%
G01BMeasuring length, thickness or similar linear dimensions10%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them10%
PatentTitleYear
9,823,562'Imprint apparatus, imprint method, and method of manufacturing article'20179,341,468'Measuring apparatus'20167,630,056'Exposure apparatus and device manufacturing method'20097,394,522'Exposure apparatus and device manufacturing method'2008

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2008–2017Patents assigned to CANON KK (4)· patent assignee history
2008–2009Based in Kawachi-gun, JP· patent location history
2016–2017Based in Utsunomiya, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
CANON KK42008–2017
Locations
LocationPatentsSpan
Utsunomiya, JP22016–2017
Kawachi-gun, JP22008–2009