Inventor
Oleg Feliksovich Yakushev
Inventor
Korolyev, RU
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
H05GX-ray technique24%
B82YSpecific uses or applications of nanostructures10%
H01JElectric discharge tubes or discharge lamps10%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light5%
G01NInvestigating or analysing materials by determining their chemical or physical properties5%
G02BOptical elements, systems or apparatus5%
G21KHandling of particles or ionising radiation not otherwise provided for5%
PatentTitleYear
10,887,973High brightness laser-produced plasma light source202110,753,798Compact wideband VUV spectrometer202010,638,588High-brightness laser produced plasma source and methods for generating radiation and mitigating debris202010,588,210High brightness short-wavelength radiation source (variants)20209,476,841'High-brightness LPP EUV light source'20169,307,624'Lithographic apparatus'20168,294,128'Apparatus with plasma radiation source and method of forming a beam of radiation'20127,825,390'Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2016Patents assigned to ASML NETHERLANDS BV (3)· patent assignee history
2010–2020Based in Moscow, RU· patent location history
2012–2016Patents assigned to BANINE VADIM YEVGENYEVICH (2)· patent assignee history
2012–2016Patents assigned to IVANOV VLADIMIR VITALEVICH (2)· patent assignee history
2012–2016Based in Korolev, RU· patent location history
2016–2021Patents assigned to ISTEQ B V (4)· patent assignee history
2016–2021Based in Korolyev, RU· patent location history
2020–2021Patents assigned to RND ISAN LTD (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ISTEQ B V | 4 | 2016–2021 |
| ASML NETHERLANDS BV | 3 | 2010–2016 |
| RND ISAN LTD | 3 | 2020–2021 |
| BANINE VADIM YEVGENYEVICH | 2 | 2012–2016 |
| IVANOV VLADIMIR VITALEVICH | 2 | 2012–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Korolyev, RU | 4 | 2016–2021 |
| Moscow, RU | 2 | 2010–2020 |
| Korolev, RU | 2 | 2012–2016 |