Inventor
Semyon L. Kats
Inventor
San Francisco, CA, US
Overview
Patents· 16 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1042%
C23CCoating metallic material13%
H01JElectric discharge tubes or discharge lamps13%
Y10TTechnical subjects covered by former us classification13%
H02NElectric machines not otherwise provided for8%
C04BLime, magnesia5%
C22CAlloys3%
H01RElectrically-conductive connections3%
PatentTitleYear
8,607,731'Cathode with inner and outer electrodes at different heights'20138,279,577'Substrate support having fluid channel'20127,768,765'Substrate support having heat transfer system'20107,672,110'Electrostatic chuck having textured contact surface'20107,479,464'Low temperature aerosol deposition of a plasma resistive layer'20097,221,553'Substrate support having heat transfer system'20076,721,162'Electrostatic chuck having composite dielectric layer and method of manufacture'20046,538,872'Electrostatic chuck having heater and method'20036,490,145'Substrate support pedestal'20026,490,146'Electrostatic chuck bonded to base with a bond layer and method'20026,462,928'Electrostatic chuck having improved electrical connector and method'20026,414,834'Dielectric covered electrostatic chuck'20026,310,755'Electrostatic chuck having gas cavity and method'20016,278,600'Electrostatic chuck with improved temperature control and puncture resistance'20016,151,203'Connectors for an electrostatic chuck and combination thereof'20006,108,189'Electrostatic chuck having improved gas conduits'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2013Patents assigned to APPLIED MATERIALS INC (16)· patent assignee history
2000–2013Based in San Francisco, CA, US· patent location history
2012–2013Patents assigned to HOFFMAN DANIEL J (2)· patent assignee history
2012Patents assigned to CHENG WING LAU (1)· patent assignee history
2012Patents assigned to HANAWA HIROJI (1)· patent assignee history
2013Patents assigned to BUCHBERGER JR DOUGLAS A (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 16 | 2000–2013 |
| HOFFMAN DANIEL J | 2 | 2012–2013 |
| BUCHBERGER JR DOUGLAS A | 1 | 2013 |
| CHENG WING LAU | 1 | 2012 |
| HANAWA HIROJI | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Francisco, California, US | 16 | 2000–2013 |