Inventor
ROBERT M. BIGWOOD
Inventor
US
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
H01LSemiconductor devices20%
H10DInorganic electric semiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1020%
PatentTitleYear
12,278,204Pattern decomposition lithography techniques2025Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2025Patents assigned to INTEL CORP (1)· patent assignee history
2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| INTEL CORP | 1 | 2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 1 | 2025 |