Inventor
Tracy A. Gast
Inventor
Waconia, MN, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
B05BSpraying apparatus17%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests17%
H01LSemiconductor devices13%
Y10TTechnical subjects covered by former us classification10%
B08BCleaning in general3%
PatentTitleYear
9,666,456'Method and apparatus for treating a workpiece with arrays of nozzles'20179,039,840'Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation'20158,978,675'Method and apparatus for treating a workpiece with arrays of nozzles'20158,967,167'Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids'20158,684,015'Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation'20148,668,778'Method of removing liquid from a barrier structure'20148,387,635'Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids'20138,235,062'Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation'20128,070,884'Methods for rinsing microelectronic substrates utilizing cool rinse fluid within a gas enviroment including a drying enhancement substance'20117,913,706'Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses'20117,244,315'Microelectronic device drying devices and techniques'20076,845,779'Edge gripping device for handling a set of semiconductor wafers in an immersion processing system'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005–2015Patents assigned to FSI INT INC (8)· patent assignee history
2005–2017Based in Waconia, MN, US· patent location history
2011–2014Patents assigned to GAST TRACY A (4)· patent assignee history
2012–2014Patents assigned to COLLINS JIMMY D (3)· patent assignee history
2012–2014Patents assigned to ROSE ALAN D (3)· patent assignee history
2013–2017Patents assigned to TEL FSI INC (7)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| FSI INT INC | 8 | 2005–2015 |
| TEL FSI INC | 7 | 2013–2017 |
| GAST TRACY Aself | 4 | 2011–2014 |
| COLLINS JIMMY D | 3 | 2012–2014 |
| ROSE ALAN D | 3 | 2012–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Waconia, Minnesota, US | 12 | 2005–2017 |