Inventor
David M. Burtner
Inventor
Belmont, MA, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps79%
C23CCoating metallic material7%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
Y10TTechnical subjects covered by former us classification7%
PatentTitleYear
7,914,603'Particle trap for a plasma source'20117,853,364'Adaptive controller for ion source'20107,718,983'Sputtered contamination shielding for an ion source'20107,566,883'Thermal transfer sheet for ion source'20097,476,869'Gas distributor for ion source'20097,439,521'Ion source with removable anode assembly'20087,425,711'Thermal control plate for ion source'20087,425,709'Modular ion source'20087,342,236'Fluid-cooled ion source'20086,984,942'Longitudinal cathode expansion in an ion source'20066,919,690'Modular uniform gas distribution system in an ion source'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005–2010Patents assigned to VEECO INSTR INC (10)· patent assignee history
2005–2010Based in Fort Collins, CO, US· patent location history
2008–2011Based in Belmont, MA, US· patent location history
2011Patents assigned to MKS INSTR INC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VEECO INSTR INC | 10 | 2005–2010 |
| MKS INSTR INC | 1 | 2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| Belmont, Massachusetts, US | 6 | 2008–2011 |
| Fort Collins, CO, US | 5 | 2005–2010 |