Inventor
Dominik Marcel Vaudrevange
Inventor
Aachen, DE
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H05Gprimary
H05GX-ray technique54%
H01JElectric discharge tubes or discharge lamps15%
B82YSpecific uses or applications of nanostructures8%
F28DHeat-exchange apparatus, not provided for in another subclass, in which the heat-exchange media do not come into direct contact8%
F28FDetails of heat-exchange and heat-transfer apparatus, of general application8%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices8%
PatentTitleYear
9,581,392'Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type'20179,202,659'Arrangement and method for cooling a plasma-based radiation source'20158,519,368'Method and device for generating EUV radiation or soft X-rays'20138,040,030'Method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp and a corresponding apparatus'20117,688,948'Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology'20107,468,521'Lithographic apparatus and device manufacturing method'20087,427,766'Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation'20087,323,701'Gas discharge lamp'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2011Patents assigned to KONINKL PHILIPS ELECTRONICS NV (4)· patent assignee history
2008Patents assigned to ASML NETHERLANDS BV (1)· patent assignee history
2008–2017Based in Aachen, DE· patent location history
2011–2013Based in Neuss, DE· patent location history
2013Patents assigned to KONINKL PHILIPS NV (1)· patent assignee history
2013Patents assigned to NEFF JAKOB WILLI (1)· patent assignee history
2015–2017Patents assigned to USHIO ELECTRIC INC (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KONINKL PHILIPS ELECTRONICS NV | 4 | 2008–2011 |
| USHIO ELECTRIC INC | 2 | 2015–2017 |
| ASML NETHERLANDS BV | 1 | 2008 |
| KONINKL PHILIPS NV | 1 | 2013 |
| NEFF JAKOB WILLI | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aachen, DE | 6 | 2008–2017 |
| Neuss, DE | 2 | 2011–2013 |