Inventor
YungShan Chang
Inventor
Plano, TX, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G02Bprimary
G02BOptical elements, systems or apparatus19%
H01LSemiconductor devices15%
H10NElectric solid-state devices not otherwise provided for15%
B81BMicrostructural devices or systems, e.g. micromechanical devices11%
C23FNon-mechanical removal of metallic material from surface7%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein7%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them7%
H04NPictorial communication, e.g. television7%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h107%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems4%
PatentTitleYear
10,829,365Piezoelectric optical MEMS device with embedded moisture layers202010,319,899Method of forming a semiconductor device20199,939,710High-temperature isotropic plasma etching process to prevent electrical shorts20189,890,040'Stress compensation for piezoelectric optical MEMS devices'20189,834,433Piezoelectric optical MEMS device with embedded moisture layers20179,755,139'Piezoeletric wet etch process with reduced resist lifting and controlled undercut'20179,405,089'High-temperature isotropic plasma etching process to prevent electrical shorts'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2020Patents assigned to TEXAS INSTRUMENTS INC (7)· patent assignee history
2016–2020Based in Plano, TX, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TEXAS INSTRUMENTS INC | 7 | 2016–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Plano, Texas, US | 7 | 2016–2020 |