Inventor
Akito Shimizu
Inventor
Yamanashi, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices33%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1023%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
H01JElectric discharge tubes or discharge lamps13%
C23CCoating metallic material7%
H05HPlasma technique3%
H10NElectric solid-state devices not otherwise provided for3%
PatentTitleYear
10,985,029Substrate processing apparatus and substrate processing method202110,975,468Method of cleaning plasma processing apparatus202110,923,358Substrate processing method202110,923,329Substrate processing apparatus and substrate processing method202110,903,083Substrate processing method, substrate processing apparatus and substrate processing system202110,840,166Semiconductor device202010,347,551Semiconductor package20199,741,641'Method for manufacturing semiconductor device, and semiconductor device'20179,368,432'Semiconductor device and manufacturing method of semiconductor device'20169,293,396'Method for manufacturing semiconductor device, and semiconductor device'20169,018,745'Method for manufacturing semiconductor device, and semiconductor device'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2017Patents assigned to RENESAS ELECTRONICS CORP (4)· patent assignee history
2015Patents assigned to RENESAS CORP (1)· patent assignee history
2015–2016Based in Kawasaki, JP· patent location history
2019–2020Patents assigned to TOSHIBA KK (2)· patent assignee history
2020Patents assigned to TOSHIBA ELECTRONIC DEVICES & STORAGE CORP (1)· patent assignee history
2020Based in Kanagawa, JP· patent location history
2021Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2021Based in Yamanashi, JP· patent location history
2021Based in Miyagi, JP· patent location history
2021Based in Nirasaki, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 5 | 2021 |
| RENESAS ELECTRONICS CORP | 4 | 2015–2017 |
| TOSHIBA KK | 2 | 2019–2020 |
| RENESAS CORP | 1 | 2015 |
| TOSHIBA ELECTRONIC DEVICES & STORAGE CORP | 1 | 2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yamanashi, JP | 3 | 2021 |
| Kawasaki, JP | 3 | 2015–2016 |
| Miyagi, JP | 1 | 2021 |
| Nirasaki, JP | 1 | 2021 |
| Kanagawa, JP | 1 | 2020 |