LexDanaLexDanabeta
Inventor

Prashant Gadgil

Inventor
Fremont, CA, US

Overview

3→
Patents
1998–2001
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
H01JElectric discharge tubes or discharge lamps33%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1017%
PatentTitleYear
6,241,845'Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer'20016,048,798'Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer'20005,783,496'Methods and apparatus for etching self-aligned contacts'1998

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1998–2001Patents assigned to LAM RES CORP (3)· patent assignee history
1998–2001Based in Fremont, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LAM RES CORP31998–2001
Locations
LocationPatentsSpan
Fremont, California, US31998–2001