Inventor
Hessel Sprey
Inventor
Kessel-Lo, BE
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H10DInorganic electric semiconductor devices17%
C23CCoating metallic material13%
H01LSemiconductor devices13%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1013%
C23FNon-mechanical removal of metallic material from surface8%
C30BSingle-crystal growth6%
H01JElectric discharge tubes or discharge lamps2%
PatentTitleYear
11,088,002Substrate rack and a substrate processing system and method202110,699,899Atomic layer deposition of antimony oxide films202010,056,249Atomic layer deposition of antimony oxide films20189,552,979'Cyclic aluminum nitride deposition in a batch reactor'20179,514,934'Atomic layer deposition of antimony oxide films'20169,006,112'Atomic layer deposition of antimony oxide films'20158,652,573'Method of CVD-depositing a film having a substantially uniform film thickness'20147,981,791'Thin films'20117,884,016'Liner materials and related processes for 3-D integration'20117,498,242'Plasma pre-treating surfaces for atomic layer deposition'20097,419,903'Thin films'20086,884,317'Method and installation for etching a substrate'20056,878,628'In situ reduction of copper oxide prior to silicon carbide deposition'20056,759,325'Sealing porous structures'20046,387,827'Method for growing thin silicon oxides on a silicon substrate using chlorine precursors'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2005Based in Leuven, BE· patent location history
2004–2021Based in Kessel-Lo, BE· patent location history
2005–2015Patents assigned to ASM INT (6)· patent assignee history
2009Patents assigned to ASM INC (1)· patent assignee history
2014Patents assigned to ADJEROUD NOUREDDINE (1)· patent assignee history
2014Based in Almere, NL· patent location history
2016–2020Patents assigned to ASM INT NV (3)· patent assignee history
2017–2021Patents assigned to ASM IP HOLDING BV (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASM INT | 6 | 2005–2015 |
| ASM INT NV | 3 | 2016–2020 |
| ASM IP HOLDING BV | 2 | 2017–2021 |
| ADJEROUD NOUREDDINE | 1 | 2014 |
| ASM INC | 1 | 2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kessel-Lo, BE | 12 | 2004–2021 |
| Leuven, BE | 2 | 2002–2005 |
| Almere, NL | 1 | 2014 |