Inventor
Sanjit K. Das
Inventor
Austin, TX, US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
B24BMachines, devices, or processes for grinding or polishing19%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1019%
C09GPolishing compositions13%
C09KMaterials for miscellaneous applications, not provided for elsewhere6%
C23CCoating metallic material6%
C23FNon-mechanical removal of metallic material from surface6%
PatentTitleYear
7,009,280'Low-k interlevel dielectric layer (ILD)'20066,831,363'Structure and method for reducing thermo-mechanical stress in stacked vias'20046,822,472'Detection of hard mask remaining on a surface of an insulating layer'20046,071,816'Method of chemical mechanical planarization using a water rinse to prevent particle contamination'20006,001,730'Chemical mechanical polishing (CMP) slurry for polishing copper interconnects which use tantalum-based barrier layers'19995,928,962'Process for forming a semiconductor device'19995,897,375'Chemical mechanical polishing (CMP) slurry for copper and method of use in integrated circuit manufacture'19995,882,243'Method for polishing a semiconductor wafer using dynamic control'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999–2000Patents assigned to MOTOROLA INC (5)· patent assignee history
1999–2000Based in Austin, TX, US· patent location history
2004–2006Patents assigned to IBM (3)· patent assignee history
2004–2006Based in Poughkeepsie, NY, US· patent location history
2004Based in Pougkeepsie, NY, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MOTOROLA INC | 5 | 1999–2000 |
| IBM | 3 | 2004–2006 |
Locations
| Location | Patents | Span |
|---|---|---|
| Austin, Texas, US | 5 | 1999–2000 |
| Poughkeepsie, New York, US | 2 | 2004–2006 |
| Pougkeepsie, New York, US | 1 | 2004 |