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Inventor

Alon YAGIL

Inventor
US

Overview

1→
Patents
2022
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Bprimary
G01BMeasuring length, thickness or similar linear dimensions25%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
11,454,894Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022Patents assigned to KLA CORP (1)· patent assignee history
2022Based in US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KLA CORP12022
Locations
LocationPatentsSpan
US12022