Inventor
Marvin Farley
Inventor
Ipswich, MA, US
Overview
Patents· 39 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps51%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
F16CShafts4%
H01LSemiconductor devices4%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests4%
B09BDisposal of solid waste not otherwise provided for3%
C23CCoating metallic material3%
E03CDomestic plumbing installations for fresh water or waste water3%
A47GHousehold or table equipment1%
A47JKitchen equipment1%
PatentTitleYear
10,403,503Wafer cooling system and method20199,978,599Wafer cooling apparatus and method20189,842,752'Optical heat source with restricted wavelengths for process heating'20179,558,914'Bipolar wafer charge monitor system and ion implantation system comprising same'20179,218,941'Ion implantation system and method with variable energy control'20158,227,768'Low-inertia multi-axis multi-directional mechanically scanned ion implantation system'20128,168,941'Ion beam angle calibration and emittance measurement system for ribbon beams'20128,124,946'Post-decel magnetic energy filter for ion implantation systems'20127,872,247'Ion beam guide tube'20117,611,975'Method of implanting a substrate and an ion implanter for performing the method'20097,582,883'Method of scanning a substrate in an ion implanter'20097,479,644'Ion beam diagnostics'20097,282,427'Method of implanting a substrate and an ion implanter for performing the method'20077,253,424'Method of implanting a substrate and an ion implanter for performing the method'20077,235,797'Method of implanting a substrate and an ion implanter for performing the method'20077,049,210'Method of implanting a substrate and an ion implanter for performing the method'20066,989,315'SIMOX using controlled water vapor for oxygen implants'20066,956,223'Multi-directional scanning of movable member and ion beam monitoring arrangement therefor'20056,908,836'Method of implanting a substrate and an ion implanter for performing the method'20056,878,946'Indirectly heated button cathode for an ion source'20056,870,170'Ion implant dose control'20056,555,832'Determining beam alignment in ion implantation using Rutherford Back Scattering'20036,515,288'Vacuum bearing structure and a method of supporting a movable member'20036,501,078'Ion extraction assembly'20026,437,351'Method and apparatus for controlling a workpiece in a vacuum chamber'20026,331,713'Movable ion source assembly'20016,297,510'Ion implant dose control'20016,274,875'Fluid bearing vacuum seal assembly'20016,271,530'Apparatus for reducing distortion in fluid bearing surfaces'20016,271,529'Ion implantation with charge neutralization'20016,268,609'Apparatus and method for reducing heating of a workpiece in ion implantation'20016,248,642'SIMOX using controlled water vapor for oxygen implants'20016,163,033'Method and apparatus for controlling a workpiece in a vacuum chamber'20005,898,179'Method and apparatus for controlling a workpiece in a vacuum chamber'19994,804,852'Treating work pieces with electro-magnetically scanned ion beams'19894,804,837'Ion implantation surface charge control method and apparatus'19894,675,530'Charge density detector for beam implantation'19874,587,433'Dose control apparatus'19864,539,217'Dose control method'1985Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1985–1989Patents assigned to EATON CORP (5)· patent assignee history
1985–2019Based in Ipswich, MA, US· patent location history
2000–2011Patents assigned to APPLIED MATERIALS INC (22)· patent assignee history
2012–2019Patents assigned to AXCELIS TECH INC (8)· patent assignee history
2012–2017Patents assigned to FARLEY MARVIN (4)· patent assignee history
2012Patents assigned to RYDING GEOFFREY (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 22 | 2000–2011 |
| AXCELIS TECH INC | 8 | 2012–2019 |
| EATON CORP | 5 | 1985–1989 |
| FARLEY MARVINself | 4 | 2012–2017 |
| RYDING GEOFFREY | 3 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Ipswich, Massachusetts, US | 39 | 1985–2019 |